Transition metal precipitates in mc Si: a new detection method using 3D-FIB

To investigate transition metal precipitates in Si, synchrotron based measurements, like micro x-ray fluorescence (μXRF) or detailed transmission electron microscopy (TEM) studies, are usually necessary. Transition metals are among the most detrimental defects in multi-crystalline (mc) silicon material for solar cell applications, due to their impact on minority charge carrier lifetime and possible shunt formation. We present another possibility to investigate transition metal precipitates by 3-dimensional focused ion beam (3D-FIB) cutting using a combined scanning electron microscope (SEM) SEM-FIB-system. This method is able to detect transition metal precipitates down to 5 nm in radius and provides additional information about the 3D shape, size and spatial distribution of the precipitates.